najoNanosystems: Physics, Chemistry, MathematicsНаносистемы: физика, химия, математика2220-80542305-7971Университет ИТМО10.17586/2220-8054-2015-6-3-424-434najo-1000Research ArticleCHEMISTRY AND MATERIALS SCIENCEХИМИЯ И НАУКА О МАТЕРИАЛАХChemostimulating e ect of mixture and separate evaporation of manganese (IV) oxide compositions with lead (II) oxide and vanadium (V) oxide on GaAs thermal oxidationMittovaI. Yu.

Universitetskaya pl.1, Voronezh, 394893

imittova@mail.ruKostryukovV. F.

Universitetskaya pl.1, Voronezh, 394893

vc@chem.vsu.ruVoronezh State UniversityRussian Federation20151508202563424434Copyright © Mittova I.Y., Kostryukov V.F., 20252025Mittova I.Y., Kostryukov V.F.Mittova I.Y., Kostryukov V.F.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://nanojournal.ifmo.ru/jour/article/view/1000

The e ects of variable compositions of manganese (IV) oxide- lead (II) oxide and manganese (IV) oxide vanadium (V) oxide on the GaAs thermal oxidation process have been studied. The spatial separation of the oxides in MnO2 + PbO and MnO2 + V2O5 binary compositions activating the thermal oxidation of GaAs has made it possible to locate the interactions between these oxides that are responsible for the non-linear e ects observed in their coaction. Solid-phase interactions enhance the chemostimulating activities of both oxides (a positive nonlinear e ect takes place). Gas-phase interactions cause a marked negative deviation from the additive chemical stimulation e ect.

semiconductorsgallium arsenidethin lmsthermal oxidationnonlinear effectsThe reported study was supported by he Ministry of Education and Science of the Russian Federation as a project part of the State Task for higher education institutions in the sphere of scientic research for years 20142016 (project N 225), and funded by the Russian Foundation for Basic Research (grant N 13-03-00705-a).ReferencesMittova I.Ya., Pshestanchik V.R., Kostryukov V.F. Thermal Oxidation of Gallium Arsenide in oxygen: combined e ect of Antimony and Bismuth oxides. Russian Journal of Inorganic Chemistry, 1997, 42(2), P. 182187.Mittova I.Ya., Pshestanchik V.R., Kostryukov V.F. Thermal Oxidation of Gallium Arsenide in oxygen: combined e ect of Antimony and Bismuth oxides. Russian Journal of Inorganic Chemistry, 1997, 42(2), P. 182187.Mittova I.Ya., Pshestanchik V.R., Kostryukov V.F. Alternating Alternating nonlinearity of the joint activating e ect of binary mixtures of p-element oxides on the chemically activated thermal GaAs oxidation. Doklady Chemistry, 2001, 378(4-6), P. 165167.Mittova I.Ya., Pshestanchik V.R., Kostryukov V.F. Alternating Alternating nonlinearity of the joint activating e ect of binary mixtures of p-element oxides on the chemically activated thermal GaAs oxidation. Doklady Chemistry, 2001, 378(4-6), P. 165167.Mittova I.Ya., Kostryukov V.F. GaAs Thermal oxidation activated by the coaction of p-block oxides. Nanosystems: physics, chemistry, mathematics, 2014, 5(3), P. 417426.Mittova I.Ya., Kostryukov V.F. GaAs Thermal oxidation activated by the coaction of p-block oxides. Nanosystems: physics, chemistry, mathematics, 2014, 5(3), P. 417426.Mittova I.Ya., Pshestanchik V.R., Kostryukov V.F., Donkareva I.A. Spatial Localization of Interac tions between Activating Additives during Chemostimulated Thermal Oxidation of GaAs. Doklady Chemistry, 2002, 386(4-6), P. 258260.Mittova I.Ya., Pshestanchik V.R., Kostryukov V.F., Donkareva I.A. Spatial Localization of Interac tions between Activating Additives during Chemostimulated Thermal Oxidation of GaAs. Doklady Chemistry, 2002, 386(4-6), P. 258260.Mittova I.Ya., Pshestanchik V.R., Kostryukov V.F., Donkareva I.A. Mutual E ect of Activators on Chemostimulated GaAs Thermal Oxidation with Spatially Separated Coupling Stages. Russian Journal of Inorganic Chemistry, 2003, 48(4), P. 480483.Mittova I.Ya., Pshestanchik V.R., Kostryukov V.F., Donkareva I.A. Mutual E ect of Activators on Chemostimulated GaAs Thermal Oxidation with Spatially Separated Coupling Stages. Russian Journal of Inorganic Chemistry, 2003, 48(4), P. 480483.Mittova I.Ya., Pshestanchik V.R. The chemistry of processes which create dielectric layers with func tional group substituents on semiconductors by impurity thermo-oxidation. Russian Chemical Reviews, 1991, 60(9), P. 967980.Mittova I.Ya., Pshestanchik V.R. The chemistry of processes which create dielectric layers with func tional group substituents on semiconductors by impurity thermo-oxidation. Russian Chemical Reviews, 1991, 60(9), P. 967980.Sladkopevtcev B.V., Tretyakov N.N., Dontsov A.I., Tomina E.V., Mittova I.Ya. E ect of oxide compo sition (V2O5+Al2O3) via gas phase on the thermal oxidation of InP. Nanosystems: physics, chemistry, mathematics, 2013, 4(2), P. 260268.Sladkopevtcev B.V., Tretyakov N.N., Dontsov A.I., Tomina E.V., Mittova I.Ya. E ect of oxide compo sition (V2O5+Al2O3) via gas phase on the thermal oxidation of InP. Nanosystems: physics, chemistry, mathematics, 2013, 4(2), P. 260268.Di raction Data. Catalog. International centre for di raction data.Di raction Data. Catalog. International centre for di raction data.Hufner S. Photoelectron Spectroscopy. Principles and Applications. Heidelberg, Springer Verlag, 1995, 515 p.Hufner S. Photoelectron Spectroscopy. Principles and Applications. Heidelberg, Springer Verlag, 1995, 515 p.Nakamoto K. Infrared and Raman Spectra of Inorganic and Coordination Compounds. World, Moscow, 1991, 441 p.Nakamoto K. Infrared and Raman Spectra of Inorganic and Coordination Compounds. World, Moscow, 1991, 441 p.Balicheva T.G., et al. Physical methods of inorganic substances. Academia, Moscow, 2006, 442 p.Balicheva T.G., et al. Physical methods of inorganic substances. Academia, Moscow, 2006, 442 p.Kazenas E.K., Tsvetkov Yu.V. Evaporation of oxides. Science, Moscow, 1997, 543 p.Kazenas E.K., Tsvetkov Yu.V. Evaporation of oxides. Science, Moscow, 1997, 543 p.Goldstein J.I., Newbury D.E., Echlin P. Scanning Electron Microscopy and X-Ray Microanalysis, 1992, 829 p.Goldstein J.I., Newbury D.E., Echlin P. Scanning Electron Microscopy and X-Ray Microanalysis, 1992, 829 p.

The authors declare that there are no conflicts of interest present.