najoNanosystems: Physics, Chemistry, MathematicsНаносистемы: физика, химия, математика2220-80542305-7971Университет ИТМО10.17586/2220-8054-2024-15-5-643-653najo-119Research ArticlePHYSICSФИЗИКАInertial nanostep piezoelectric drive: modeling and experimentИнерциальный наношаговый пьезоэлектрический привод: моделирование и экспериментhttps://orcid.org/0000-0002-7054-6602ГорбенкоО. М.GorbenkoOlga M.

Горбенко Ольга Марковна

 

Olga M. Gorbenko

St. Petersburg

gorolga64@gmail.comhttps://orcid.org/0000-0002-5356-1261ЛукашенкоС. Ю.LukashenkoStanislav Y.

Лукашенко Станислав Юрьевич

 

Stanislav Y. Lukashenko

St. Petersburg

lukashenko13@mail.ruhttps://orcid.org/0000-0002-8578-5200ПичахчиС. В.PichakhchiStepan V.

Пичахчи Степан Витальевич

 

Stepan V. Pichakhchi

St. Petersburg

pichakhchi.s@yandex.ruhttps://orcid.org/0000-0003-2575-5015СапожниковИ. Д.SapozhnikovIvan D.

Сапожников Иван Дмитриевич

Ivan D. Sapozhnikov

St. Petersburg

sapojnikov@gmail.comhttps://orcid.org/0000-0001-8677-061XФельштынМ. Л.FelshtynMikhail L.

Фельштын Михаил Леопольдович

Mikhail L. Felshtyn

St. Petersburg

mfelsztyn@yandex.ruhttps://orcid.org/0000-0001-9970-9172ГолубокА. О.GolubokAlexander O.

Голубок Александр Олегович

Alexander O. Golubok

St. Petersburg

aogolubok@mail.ruInstitute for Analytical Instrumentation of RASRussian FederationInstitute for Analytical Instrumentation of RAS; St. Petersburg Academic UniversityRussian Federation202403062025155643653Copyright © Gorbenko O.M., Lukashenko S.Y., Pichakhchi S.V., Sapozhnikov I.D., Felshtyn M.L., Golubok A.O., 20252025Горбенко О.М., Лукашенко С.Ю., Пичахчи С.В., Сапожников И.Д., Фельштын М.Л., Голубок А.О.Gorbenko O.M., Lukashenko S.Y., Pichakhchi S.V., Sapozhnikov I.D., Felshtyn M.L., Golubok A.O.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://nanojournal.ifmo.ru/jour/article/view/119

A vertical inertial nanostep piezoelectric drive is considered. A virtual model was created, and the operating modes of a real drive were studied by numerical experiment. Piezo electromechanical resonance was discovered and a method to eliminate resonant vibrations by increasing electrical losses in the discharge circuit of the piezo actuator capacitance was proposed. A satisfactory agreement between the calculated and experimental data for the drive steps in the nanometer displacement range was obtained.

Рассмотрен вертикальный инерциальный пьезоэлектрический нано-шаговый привод. Создана виртуальная модель, и путем численного эксперимента исследованы режимы работы реального привода. Обнаружен пьезоэлектромеханический резонанс и предложен способ устранения резонансных колебаний путём увеличения электрических потерь в цепи разряда емкости пьезоактюатора. Получено удовлетворительное согласие между расчетными и экспериментальными данными для шагов привода в нанометровом диапазоне перемещений.

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The authors declare that there are no conflicts of interest present.