najoNanosystems: Physics, Chemistry, MathematicsНаносистемы: физика, химия, математика2220-80542305-7971Университет ИТМО10.17586/2220-8054-2016-7-3-547-552najo-1314Research ArticlePAPERS, PRESENTED AT NANO-2015PAPERS, PRESENTED AT NANO-2015Annealing effects on V2O5-x thin films deposited by non reactive sputteringAnnealing effects on V2O5-x thin films deposited by non reactive sputteringMaliniD. RachelMaliniD. Rachel

Department of Physics

Madurai-625002

Department of Physics

Madurai-625002

SivakumarR.SivakumarR.

Karaikudi-630004

Karaikudi-630004

SanjeevirajaС.SanjeevirajaC.

Department of Physics

Karaikudi-630004

Department of Physics

Karaikudi-630004

sanjeeviraja@rediffmail.comThe American CollegeThe American CollegeDirectorate of Distance Education, Alagappa UniversityDirectorate of Distance Education, Alagappa UniversityA.C. College of Engg. & TechA.C. College of Engg. & Tech20162008202573547552Copyright © Malini D., Sivakumar R., Sanjeeviraja C., 20252025Malini D., Sivakumar R., Sanjeeviraja С.Malini D., Sivakumar R., Sanjeeviraja C.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://nanojournal.ifmo.ru/jour/article/view/1314

Thin films of vanadium oxide (V2O5−x) were prepared by rf magnetron sputtering process and are heat treated to study the annealing effect. As-deposited thin films are amorphous in nature and crystallinity is improved by annealing the sample. Thin layers with high density and small grain size varying from 36 nm to 70 nm were seen in the FESEM images of as-deposited thin films. In the case of annealed thin films, it has been transformed to thin elongated rod like structure with 202.5 nm length and an average diameter of approximately 48 nm. Optical properties were studied by using UV-Vis-NIR spectrophotometer and the reduction in transmission in annealed thin films is due to the crystalline nature of thin films. Studies were done on the samples by taking photoluminescence and Laser Raman spectra.

Thin films of vanadium oxide (V2O5−x) were prepared by rf magnetron sputtering process and are heat treated to study the annealing effect. As-deposited thin films are amorphous in nature and crystallinity is improved by annealing the sample. Thin layers with high density and small grain size varying from 36 nm to 70 nm were seen in the FESEM images of as-deposited thin films. In the case of annealed thin films, it has been transformed to thin elongated rod like structure with 202.5 nm length and an average diameter of approximately 48 nm. Optical properties were studied by using UV-Vis-NIR spectrophotometer and the reduction in transmission in annealed thin films is due to the crystalline nature of thin films. Studies were done on the samples by taking photoluminescence and Laser Raman spectra.

vanadium oxiderf magnetron sputteringannealingvanadium oxiderf magnetron sputteringannealingReferencesRajendra Kumar R.T., Karunagaran B., et al. Structural properties of V2O5 thin films prepared by vacuum evaporation, Mat. Sci. Semicon. Proc., 2003, 6, P. 543–546.Rajendra Kumar R.T., Karunagaran B., et al. Structural properties of V2O5 thin films prepared by vacuum evaporation, Mat. Sci. Semicon. Proc., 2003, 6, P. 543–546.Takahashi K., Wang Y., Cao G. Growth and electrochromic properties of single-crystal V2O5 nanorod arrays. Appl. Phys. Lett., 2005, 86, P. 053102-1—053102-3.Takahashi K., Wang Y., Cao G. Growth and electrochromic properties of single-crystal V2O5 nanorod arrays. Appl. Phys. Lett., 2005, 86, P. 053102-1—053102-3.Ramana C.V., Hussain O.M., et al. Physical investigations on electron-beam evaporated vanadium pentoxide films. Mater. Sci. Eng. B, 1998, 52, P. 32–39.Ramana C.V., Hussain O.M., et al. Physical investigations on electron-beam evaporated vanadium pentoxide films. Mater. Sci. Eng. B, 1998, 52, P. 32–39.Fujita Y., Miyazaki K., Tatsuyama C. On the electrochromism of evaporated V2O5 films. Jpn. J. Appl. Phys., 1985, 24, P. 1082–1086.Fujita Y., Miyazaki K., Tatsuyama C. On the electrochromism of evaporated V2O5 films. Jpn. J. Appl. Phys., 1985, 24, P. 1082–1086.Kim B.H., Kim A., et al. Energy gap modulation in V2O5 nanowires by gas adsorption. Appl. Phys. Lett, 2008, 93, P. 233101–233103.Kim B.H., Kim A., et al. Energy gap modulation in V2O5 nanowires by gas adsorption. Appl. Phys. Lett, 2008, 93, P. 233101–233103.Raible I., Burghard M., et al. V2O5 nanofibres: novel gas sensors with extremely high sensitivity and selectivity to amines. Actuat. B, 2005,106 P. 730–735.Raible I., Burghard M., et al. V2O5 nanofibres: novel gas sensors with extremely high sensitivity and selectivity to amines. Actuat. B, 2005,106 P. 730–735.Moshfegh A.Z., Ignatiev A. Formation and characterization of thin film vanadium oxides: Auger electron spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction, scanning electron microscopy, and optical reflectance studies. Thin Solid Films, 1991, 198 P. 251–268.Moshfegh A.Z., Ignatiev A. Formation and characterization of thin film vanadium oxides: Auger electron spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction, scanning electron microscopy, and optical reflectance studies. Thin Solid Films, 1991, 198 P. 251–268.Wang Y., Takahashi K., Shang H., Cao G. Synthesis and Electrochemical Properties of Vanadium Pentoxide Nanotube Arrays. J. Phys. Chem. B, 2005, 109, P. 3085–3088.Wang Y., Takahashi K., Shang H., Cao G. Synthesis and Electrochemical Properties of Vanadium Pentoxide Nanotube Arrays. J. Phys. Chem. B, 2005, 109, P. 3085–3088.Alaa A. Akl. Crystallization and electrical properties of V2O5 thin films prepared by RF sputtering. Appl.Surf.Sci., 2007, 25, P. 7094–7099.Alaa A. Akl. Crystallization and electrical properties of V2O5 thin films prepared by RF sputtering. Appl.Surf.Sci., 2007, 25, P. 7094–7099.Rachel Malini D., Sanjeeviraja C. Effect of RF power on electrochromic V-Ce mixed oxide thin films. Electrochim. Acta, 2013, 104, P. 162–169.Rachel Malini D., Sanjeeviraja C. Effect of RF power on electrochromic V-Ce mixed oxide thin films. Electrochim. Acta, 2013, 104, P. 162–169.Wu G., Du K., et al. Optical absorption edge evolution of vanadium pentoxide films during lithium intercalation. Thin Solid Films, 2005, 485, P. 284–289.Wu G., Du K., et al. Optical absorption edge evolution of vanadium pentoxide films during lithium intercalation. Thin Solid Films, 2005, 485, P. 284–289.Kingery W.D. in: W. Kingery (Ed). Kinetics of High Temperature Process. MIT Press, Cambridge, MA., 1959, P. 187.Kingery W.D. in: W. Kingery (Ed). Kinetics of High Temperature Process. MIT Press, Cambridge, MA., 1959, P. 187.Michailovits L., Hevesi Liem phan I., Varga Zs. Determination of the optical constants and thickness of amorphous V2O5 thin films. Thin Solid Films, 1983, 102, P. 71–76.Michailovits L., Hevesi Liem phan I., Varga Zs. Determination of the optical constants and thickness of amorphous V2O5 thin films. Thin Solid Films, 1983, 102, P. 71–76.Meng L.-J., Silva R.A., et al. Optical and structural properties of vanadium pentoxide films prepared by d.c. reactive magnetron sputtering. Thin Solid Films, 2006, 515, P. 195–200.Meng L.-J., Silva R.A., et al. Optical and structural properties of vanadium pentoxide films prepared by d.c. reactive magnetron sputtering. Thin Solid Films, 2006, 515, P. 195–200.Cui H.-N., Teixeira V., et al. Thermochromic properties of vanadium oxide films prepared by dc reactive magnetron sputtering. Thin Solid Films, 2008, 516, P. 1484–1488.Cui H.-N., Teixeira V., et al. Thermochromic properties of vanadium oxide films prepared by dc reactive magnetron sputtering. Thin Solid Films, 2008, 516, P. 1484–1488.Guan Z.S., Yao J.N., Yang Y.A., Loo B.H. Electrochromism of annealed vacuum-evaporated V2O5 films. J. Electroanal. Chem., 1998, 443, P. 175–179.Guan Z.S., Yao J.N., Yang Y.A., Loo B.H. Electrochromism of annealed vacuum-evaporated V2O5 films. J. Electroanal. Chem., 1998, 443, P. 175–179.Ramana C.V., Hussain O.M., Srinivasulu Naidu B., Reddy P.J. Spectroscopic characterization of electron-beam evaporated V2O5 thin films. Thin Solid Films, 1997, 305, P. 219–226.Ramana C.V., Hussain O.M., Srinivasulu Naidu B., Reddy P.J. Spectroscopic characterization of electron-beam evaporated V2O5 thin films. Thin Solid Films, 1997, 305, P. 219–226.Wu M.-C., Lee C.-S. Field emission of vertically aligned V2O5 nanowires on an ITO surface prepared with gaseous transport. J. Solid State Chem., 2009, 182, P. 2285–2289.Wu M.-C., Lee C.-S. Field emission of vertically aligned V2O5 nanowires on an ITO surface prepared with gaseous transport. J. Solid State Chem., 2009, 182, P. 2285–2289.Wang Y.Q., Li Z.C., et al. Synthesis and optical properties of V2O5 nanorods. J.Chem.Phys., 2007, 126, P. 164701(1)–164701(3).Wang Y.Q., Li Z.C., et al. Synthesis and optical properties of V2O5 nanorods. J.Chem.Phys., 2007, 126, P. 164701(1)–164701(3).Wang Y.Q., Li Z.C., Zhang Z.J. Preparation of V2O5 thin film and its optical characteristics. Front. Mater. Sci. China, 2009, 3, P. 44–47.Wang Y.Q., Li Z.C., Zhang Z.J. Preparation of V2O5 thin film and its optical characteristics. Front. Mater. Sci. China, 2009, 3, P. 44–47.Subba Reddy Ch.V., Park K.-Il, et al. Simple preparation of V2O5 nanostructures and their characterization. Bull. Korean Chem. Soc., 2008, 29, P. 2061–2064.Subba Reddy Ch.V., Park K.-Il, et al. Simple preparation of V2O5 nanostructures and their characterization. Bull. Korean Chem. Soc., 2008, 29, P. 2061–2064.Lee S.H., Cheong H.M., et al. Raman spectroscopic studies of amorphous vanadium oxide thin films. Solid State Ionics., 2003, 165, P. 111–116.Lee S.H., Cheong H.M., et al. Raman spectroscopic studies of amorphous vanadium oxide thin films. Solid State Ionics., 2003, 165, P. 111–116.Chen W., Mai L., et al. Raman spectroscopic study of vanadium oxide nanotubes. J. Solid State Chem., 2004, 177, P. 377–379.Chen W., Mai L., et al. Raman spectroscopic study of vanadium oxide nanotubes. J. Solid State Chem., 2004, 177, P. 377–379.Lee S.H., Cheong H.M., et al. Improving the Durability of Amorphous Vanadium Oxide Thin-Film Electrode in a Liquid Electrolyte. Electrochem. Solid-State Lett., 2003, 6, P. A102–A105.Lee S.H., Cheong H.M., et al. Improving the Durability of Amorphous Vanadium Oxide Thin-Film Electrode in a Liquid Electrolyte. Electrochem. Solid-State Lett., 2003, 6, P. A102–A105.Julien C., Nazri G.A., Bergstrom O. Raman Scattering Studies of Microcrystalline V6O13. Phys. Status solidi.B., 1997, 201, P. 319–326.Julien C., Nazri G.A., Bergstrom O. Raman Scattering Studies of Microcrystalline V6O13. Phys. Status solidi.B., 1997, 201, P. 319–326.Julien C., Guesdon J.P., et al. The influence of the substrate material on the growth of V2O5 flash-evaporated films. Appl. Surf. Sci., 1995, 90, P. 389–391.Julien C., Guesdon J.P., et al. The influence of the substrate material on the growth of V2O5 flash-evaporated films. Appl. Surf. Sci., 1995, 90, P. 389–391.

The authors declare that there are no conflicts of interest present.