najoNanosystems: Physics, Chemistry, MathematicsНаносистемы: физика, химия, математика2220-80542305-7971Университет ИТМО10.17586/2220-8054-2025-16-6-755-762najo-1614Research ArticlePHYSICSФИЗИКАSubwavelength LIPSS-based nanopatterning of thin titanium filmsНаноструктурирование тонких титановых пленок на основе субволновых ЛИППСhttps://orcid.org/0000-0002-3895-0728ХрамовА. С.KhramovA. S.

Andrey S. Khramov

St. Petersburg, 197101

askhramov@itmo.ruhttps://orcid.org/0009-0000-2686-290XВасильевМ. Д.VasilevM. D.

Maksim D. Vasilev

St. Petersburg, 197101

mdvasilev@itmo.ruhttps://orcid.org/0000-0002-6274-1491СиневД. А.SinevD. A.

Dmitry A. Sinev

St. Petersburg, 197101

sinev@itmo.ruhttps://orcid.org/0000-0001-8005-8410ШахноЕ. А.ShakhnoE. A.

Elena A. Shakhno

St. Petersburg, 197101

elena.shakhno@mail.ruITMO UniversityRussian Federation202506012026166755762Copyright © Khramov A.S., Vasilev M.D., Sinev D.A., Shakhno E.A., 20262026Храмов А.С., Васильев М.Д., Синев Д.А., Шахно Е.А.Khramov A.S., Vasilev M.D., Sinev D.A., Shakhno E.A.This work is licensed under a Creative Commons Attribution 4.0 License.https://nanojournal.ifmo.ru/jour/article/view/1614

Precise nanopatterning of thin films is an important task in production of modern optoelectronics and photonics elements. Direct recording of laser-induced periodic surface structures (LIPSS) is a promising tool for direct subwavelength nanopatterning. Recent studies show that the dynamics of LIPSS formation changes significantly if the film is relatively thin. Here we present a comprehensive analytical model aiming to bridge the gap between the expected dynamics of electromagnetic fields during LIPSS formation and experimentally obtainable nanopatterning results. The phenomenological model of surface electromagnetic wave (SEW) propagation at the film–substrate interface illustrates the mechanism of LIPSS formation using a periodic distribution of SEW energy concentration. SEW features are calculated depending on metal film thickness, and positive feedback between the local thickness of the growing oxide layer and the SEW energy concentration is unveiled. Changes in LIPPS formation mechanisms are confirmed experimentally on titanium films with different thickness. These findings shed light on the intrinsic physical mechanisms of LIPSS formation on thin metal films and ease the possibilities for LIPPS applications for nanopatterning.

Прецизионное наноструктурирование тонких пленок является важной задачей в производстве современных элементов оптоэлектроники и фотоники. Прямая запись лазерно-индуцированных периодических поверхностных структур (ЛИППС) является перспективным инструментом для прямого субволнового наноструктурирования. Недавние исследования показывают, что динамика формирования ЛИППС существенно изменяется, если пленка является оптически тонкой. В этой работе представлена комплексная аналитическая модель, призванная сократить разрыв между ожидаемой динамикой электромагнитных полей во время формирования ЛИППС и экспериментально получаемыми результатами наноструктурирования. Феноменологическая модель распространения поверхностной электромагнитной волны (ПЭВ) на границе раздела пленка–подложка иллюстрирует механизм формирования ЛИППС с использованием периодического распределения концентрации энергии ПЭВ. Рассчитаны характеристики ПЭВ в зависимости от толщины металлической пленки, а также показана положительная обратная связь между локальной толщиной растущего оксидного слоя и концентрацией энергии ПЭВ. Изменения в механизмах формирования ЛИППС подтверждены экспериментально на пленках титана различной толщины. Эти результаты проясняют внутренние физические механизмы формирования ЛИППС на тонких металлических пленках и расширяют возможности применения ЛИППС для наноструктурирования.

 

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The authors declare that there are no conflicts of interest present.