najoNanosystems: Physics, Chemistry, MathematicsНаносистемы: физика, химия, математика2220-80542305-7971Университет ИТМО10.17586/2220-8054-2023-14-1-86-88najo-192Research ArticlePHYSICSФИЗИКАElectrical properties of “metal-carbon film” contactЭлектрические свойства контакта “металл-углеродная пленка”https://orcid.org/0000-0003-1258-2434ШалаевР. В.ShalayevR. V.

Донецк.

Rostyslav V. Shalayev,

72, R. Luxembourg str., Donetsk, 283050. 

sharos@donfti.ruИзотовА. И.IzotovA. I.

Донецк.

Anatoliy I. Izotov,

72, R. Luxembourg str., Donetsk, 283050. 

izotov.anatoli@gmail.comСироткинВ. В.SyrotkinV. V.

Донецк.

Vladimir V. Syrotkin,

72, R. Luxembourg str., Donetsk, 283050.

vladir.52@mail.ruGalkin Donetsk Institute for Physics and EngineeringRussian Federation2023050620251418688Copyright © Shalayev R.V., Izotov A.I., Syrotkin V.V., 20252025Шалаев Р.В., Изотов А.И., Сироткин В.В.Shalayev R.V., Izotov A.I., Syrotkin V.V.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://nanojournal.ifmo.ru/jour/article/view/192

Magnetron sputtering was used to obtain carbon films on of metal substrates of two types: titanium and tool chromium steel. The temperature dependence of the resistance of the films, which has a semiconductor character, has been studied. The current-voltage characteristics of the metal-carbon film contact were determined, which indicate the presence of the Schottky barrier junction.

Методом магнетронного распыления получены графитоподобные пленки на двух видах металлических подложек: титан и инструментальная хромистая сталь. Изучена температурная зависимость сопротивления пленок, которая носит полупроводниковый характер. Также получены вольт-амперные характеристики контакта металл-графитоподобная пленка, которые свидетельствуют о наличии перехода с барьером Шоттки.

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The authors declare that there are no conflicts of interest present.