<?xml version="1.0" encoding="UTF-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="en"><front><journal-meta><journal-id journal-id-type="publisher-id">najo</journal-id><journal-title-group><journal-title xml:lang="en">Nanosystems: Physics, Chemistry, Mathematics</journal-title><trans-title-group xml:lang="ru"><trans-title>Наносистемы: физика, химия, математика</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">2220-8054</issn><issn pub-type="epub">2305-7971</issn><publisher><publisher-name>Университет ИТМО</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.17586/2220-8054-2022-13-5-578-584</article-id><article-id custom-type="elpub" pub-id-type="custom">najo-271</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>Статьи</subject></subj-group></article-categories><title-group><article-title>Investigation of boron-doped delta layers in CVD diamond grown on single-sector HPHT substrates</article-title><trans-title-group xml:lang="ru"><trans-title></trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-7261-6766</contrib-id><name-alternatives><name name-style="western" xml:lang="en"><surname>Lobaev</surname><given-names>M. A.</given-names></name></name-alternatives><email xlink:type="simple">lobaev@ipfran.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0001-6478-3911</contrib-id><name-alternatives><name name-style="western" xml:lang="en"><surname>Vikharev</surname><given-names>A. L.</given-names></name></name-alternatives><email xlink:type="simple">val@ipfran.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0003-0712-2898</contrib-id><name-alternatives><name name-style="western" xml:lang="en"><surname>Gorbachev</surname><given-names>A. M.</given-names></name></name-alternatives><email xlink:type="simple">gorb@ipfran.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-8416-1738</contrib-id><name-alternatives><name name-style="western" xml:lang="en"><surname>Radishev</surname><given-names>D. B.</given-names></name></name-alternatives><email xlink:type="simple">dibr@ipfran.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-0358-3438</contrib-id><name-alternatives><name name-style="western" xml:lang="en"><surname>Arkhipova</surname><given-names>E. A.</given-names></name></name-alternatives><email xlink:type="simple">suroveginaka@ipmras.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0001-5577-2460</contrib-id><name-alternatives><name name-style="western" xml:lang="en"><surname>Drozdov</surname><given-names>M. N.</given-names></name></name-alternatives><email xlink:type="simple">drm@ipmras.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0003-0873-6584</contrib-id><name-alternatives><name name-style="western" xml:lang="en"><surname>Isaev</surname><given-names>V. A.</given-names></name></name-alternatives><email xlink:type="simple">isaev@ipfran.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0001-8087-7723</contrib-id><name-alternatives><name name-style="western" xml:lang="en"><surname>Bogdanov</surname><given-names>S. A.</given-names></name></name-alternatives><email xlink:type="simple">bogser@ipfran.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-8528-3884</contrib-id><name-alternatives><name name-style="western" xml:lang="en"><surname>Kukushkin</surname><given-names>V. A.</given-names></name></name-alternatives><email xlink:type="simple">vakuk@ipfran.ru</email><xref ref-type="aff" rid="aff-2"/></contrib></contrib-group><aff xml:lang="en" id="aff-1"><institution>Federal research center Institute of Applied Physics of the Russian Academy of Sciences</institution><country>Russian Federation</country></aff><aff xml:lang="en" id="aff-2"><institution>Federal research center Institute of Applied Physics of the Russian Academy of Sciences; National Research Lobachevsky State University of Nizhny Novgorod</institution><country>Russian Federation</country></aff><pub-date pub-type="collection"><year>2022</year></pub-date><pub-date pub-type="epub"><day>06</day><month>06</month><year>2025</year></pub-date><volume>13</volume><issue>5</issue><fpage>578</fpage><lpage>584</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Lobaev M.A., Vikharev A.L., Gorbachev A.M., Radishev D.B., Arkhipova E.A., Drozdov M.N., Isaev V.A., Bogdanov S.A., Kukushkin V.A., 2025</copyright-statement><copyright-year>2025</copyright-year><copyright-holder xml:lang="ru">Lobaev M.A., Vikharev A.L., Gorbachev A.M., Radishev D.B., Arkhipova E.A., Drozdov M.N., Isaev V.A., Bogdanov S.A., Kukushkin V.A.</copyright-holder><copyright-holder xml:lang="en">Lobaev M.A., Vikharev A.L., Gorbachev A.M., Radishev D.B., Arkhipova E.A., Drozdov M.N., Isaev V.A., Bogdanov S.A., Kukushkin V.A.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://nanojournal.ifmo.ru/jour/article/view/271">https://nanojournal.ifmo.ru/jour/article/view/271</self-uri><abstract><p>This work is devoted to experimental study of boron doped delta layers in CVD diamond. Delta layers with a thickness of 0.8 - 2 nm were grown with a concentration of boron atoms of (1 - 1.7)·1021 cm-3, and localized inside undoped defect-free diamond. The layers thickness and boron concentration were measured by secondary ion mass spectrometry (SIMS). The surface density and the Hall mobility of holes, the layer resistance at room temperature, and temperature dependences of these parameters are presented. Performed electrical measurements showed that, despite the perfect (from the point of view of the possibility of quantum effects) profile of delta layers, no significant increase was observed in the hole mobility compared to uniform doping with the same concentration of boron atoms. An explanation is proposed for the results of electrical measurements based on calculations of the delta layer profile and the concentration of delocalized holes depending on the layer thickness. It is discussed which parameters of the boron doped delta layers are needed in order to obtain a significant increase of the hole mobility in heavily doped diamond.</p></abstract><kwd-group xml:lang="en"><kwd>CVD diamond</kwd><kwd>boron delta-doping</kwd><kwd>electrical measurements</kwd><kwd>hole mobility</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Sussman R.S. CVD Diamond for Electronic Devices and Sensors, Wiley, 2009.</mixed-citation><mixed-citation xml:lang="en">Sussman R.S. CVD Diamond for Electronic Devices and Sensors, Wiley, 2009.</mixed-citation></citation-alternatives></ref><ref id="cit2"><label>2</label><citation-alternatives><mixed-citation xml:lang="ru">Lagrange J.-P., Deneuville A., Gheeraert E. A large range of boron doping with low compensation ratio for homoepitaxial diamond films. Carbon, 1999, 37 (5), P. 807-810.</mixed-citation><mixed-citation xml:lang="en">Lagrange J.-P., Deneuville A., Gheeraert E. A large range of boron doping with low compensation ratio for homoepitaxial diamond films. Carbon, 1999, 37 (5), P. 807-810.</mixed-citation></citation-alternatives></ref><ref id="cit3"><label>3</label><citation-alternatives><mixed-citation xml:lang="ru">Kobayashi T., Ariki T., et al. Analytical studies on multiple delta doping in diamond thin films for efficient hole excitation and conductivity enhancement. J. Appl. Phys., 1994, 76, 1977.</mixed-citation><mixed-citation xml:lang="en">Kobayashi T., Ariki T., et al. Analytical studies on multiple delta doping in diamond thin films for efficient hole excitation and conductivity enhancement. J. Appl. Phys., 1994, 76, 1977.</mixed-citation></citation-alternatives></ref><ref id="cit4"><label>4</label><citation-alternatives><mixed-citation xml:lang="ru">Schubert E.F. Delta-doping of semiconductors, Cambridge University Press, UK, 1996.</mixed-citation><mixed-citation xml:lang="en">Schubert E.F. Delta-doping of semiconductors, Cambridge University Press, UK, 1996.</mixed-citation></citation-alternatives></ref><ref id="cit5"><label>5</label><citation-alternatives><mixed-citation xml:lang="ru">Balmer R.S., Friel I., et al. Transport behavior of holes in boron delta-doped diamond structures. J. Appl. Phys., 2013, 113, 033702.</mixed-citation><mixed-citation xml:lang="en">Balmer R.S., Friel I., et al. Transport behavior of holes in boron delta-doped diamond structures. J. Appl. Phys., 2013, 113, 033702.</mixed-citation></citation-alternatives></ref><ref id="cit6"><label>6</label><citation-alternatives><mixed-citation xml:lang="ru">Scharpf J., Denisenko A., et al. Transport behaviour of boron delta-doped diamond. Phys. Status Solidi A, 2013, 210 (10), P. 2028-2034.</mixed-citation><mixed-citation xml:lang="en">Scharpf J., Denisenko A., et al. Transport behaviour of boron delta-doped diamond. Phys. Status Solidi A, 2013, 210 (10), P. 2028-2034.</mixed-citation></citation-alternatives></ref><ref id="cit7"><label>7</label><citation-alternatives><mixed-citation xml:lang="ru">Mer-Calfati C., Tranchant N., et al. Sharp interfaces for diamond delta-doping and SIMS profile modelling. Materials Letters, 2014, 115, P. 283-286.</mixed-citation><mixed-citation xml:lang="en">Mer-Calfati C., Tranchant N., et al. Sharp interfaces for diamond delta-doping and SIMS profile modelling. Materials Letters, 2014, 115, P. 283-286.</mixed-citation></citation-alternatives></ref><ref id="cit8"><label>8</label><citation-alternatives><mixed-citation xml:lang="ru">Chicot G., Fiori A., et al. Electronic and physico-chemical properties of nanometric boron delta-doped diamond structures. J. Appl. Phys., 2014, 116 (8), 083702.</mixed-citation><mixed-citation xml:lang="en">Chicot G., Fiori A., et al. Electronic and physico-chemical properties of nanometric boron delta-doped diamond structures. J. Appl. Phys., 2014, 116 (8), 083702.</mixed-citation></citation-alternatives></ref><ref id="cit9"><label>9</label><citation-alternatives><mixed-citation xml:lang="ru">Chicot G., Tran Thi T.N., et al. Hole transport in boron delta-doped diamond structures. Appl. Phys. Lett., 2012, 101, 162101.</mixed-citation><mixed-citation xml:lang="en">Chicot G., Tran Thi T.N., et al. Hole transport in boron delta-doped diamond structures. Appl. Phys. Lett., 2012, 101, 162101.</mixed-citation></citation-alternatives></ref><ref id="cit10"><label>10</label><citation-alternatives><mixed-citation xml:lang="ru">Edgington R., Sato S., et al. Growth and electrical characterisation of δ-doped boron layers on (111) diamond surfaces. J. Appl. Phys., 2012, 111, 033710.</mixed-citation><mixed-citation xml:lang="en">Edgington R., Sato S., et al. Growth and electrical characterisation of δ-doped boron layers on (111) diamond surfaces. J. Appl. Phys., 2012, 111, 033710.</mixed-citation></citation-alternatives></ref><ref id="cit11"><label>11</label><citation-alternatives><mixed-citation xml:lang="ru">Butler J.E., Vikharev A., et al. Nanometric diamond delta doping with boron. Phys. Status Solidi RRL, 2017, 11 (1), 1600329.</mixed-citation><mixed-citation xml:lang="en">Butler J.E., Vikharev A., et al. Nanometric diamond delta doping with boron. Phys. Status Solidi RRL, 2017, 11 (1), 1600329.</mixed-citation></citation-alternatives></ref><ref id="cit12"><label>12</label><citation-alternatives><mixed-citation xml:lang="ru">Vikharev A.L., Gorbachev A.M., et al. Novel microwave plasma-assisted CVD reactor for diamond delta doping. Phys. Status Solidi RRL, 2016, 10 (4), P. 324-327.</mixed-citation><mixed-citation xml:lang="en">Vikharev A.L., Gorbachev A.M., et al. Novel microwave plasma-assisted CVD reactor for diamond delta doping. Phys. Status Solidi RRL, 2016, 10 (4), P. 324-327.</mixed-citation></citation-alternatives></ref><ref id="cit13"><label>13</label><citation-alternatives><mixed-citation xml:lang="ru">Pakpour-Tabrizi A.C., Schenk A.K., et al. The occupied electronic structure of ultrathin boron doped diamond. Nanoscale Adv., 2020, 2, P. 1358- 1364.</mixed-citation><mixed-citation xml:lang="en">Pakpour-Tabrizi A.C., Schenk A.K., et al. The occupied electronic structure of ultrathin boron doped diamond. Nanoscale Adv., 2020, 2, P. 1358- 1364.</mixed-citation></citation-alternatives></ref><ref id="cit14"><label>14</label><citation-alternatives><mixed-citation xml:lang="ru">Fiori A., Pernot J., Gheeraert E., Bustarret E. Simulations of carrier confinement in boron δ-doped diamond devices. Phys. Status Solidi A, 2010, 207 (9), P. 2084-2087.</mixed-citation><mixed-citation xml:lang="en">Fiori A., Pernot J., Gheeraert E., Bustarret E. Simulations of carrier confinement in boron δ-doped diamond devices. Phys. Status Solidi A, 2010, 207 (9), P. 2084-2087.</mixed-citation></citation-alternatives></ref><ref id="cit15"><label>15</label><citation-alternatives><mixed-citation xml:lang="ru">Lobaev M.A., Gorbachev A.M., et al. Investigation of boron incorporation in delta doped diamond layers by secondary ion mass spectrometry. Thin Solid Films, 2018, 653, P. 215-222.</mixed-citation><mixed-citation xml:lang="en">Lobaev M.A., Gorbachev A.M., et al. Investigation of boron incorporation in delta doped diamond layers by secondary ion mass spectrometry. Thin Solid Films, 2018, 653, P. 215-222.</mixed-citation></citation-alternatives></ref><ref id="cit16"><label>16</label><citation-alternatives><mixed-citation xml:lang="ru">Lobaev M.A., Gorbachev A.M., et al. Misorientation Angle Dependence of Boron Incorporation Into CVD Diamond Delta Layers. Phys. Status Solidi B, 2019, 1800606.</mixed-citation><mixed-citation xml:lang="en">Lobaev M.A., Gorbachev A.M., et al. Misorientation Angle Dependence of Boron Incorporation Into CVD Diamond Delta Layers. Phys. Status Solidi B, 2019, 1800606.</mixed-citation></citation-alternatives></ref><ref id="cit17"><label>17</label><citation-alternatives><mixed-citation xml:lang="ru">Kukushkin V.A., Lobaev M.A., et al. Experimental and theoretical study of boron-doped delta layers of diamond deposited from the gas phase to ensure high hole mobility. Proc. of the XXVI Int. Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, 2022, 2, P. 887-888.</mixed-citation><mixed-citation xml:lang="en">Kukushkin V.A., Lobaev M.A., et al. Experimental and theoretical study of boron-doped delta layers of diamond deposited from the gas phase to ensure high hole mobility. Proc. of the XXVI Int. Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, 2022, 2, P. 887-888.</mixed-citation></citation-alternatives></ref><ref id="cit18"><label>18</label><citation-alternatives><mixed-citation xml:lang="ru">Eaton S.C., Anderson A.B., et al. Co-doping of Diamond with Boron and Sulfur. Electrochem. Solid-State Lett., 2002, 5, G65.</mixed-citation><mixed-citation xml:lang="en">Eaton S.C., Anderson A.B., et al. Co-doping of Diamond with Boron and Sulfur. Electrochem. Solid-State Lett., 2002, 5, G65.</mixed-citation></citation-alternatives></ref><ref id="cit19"><label>19</label><citation-alternatives><mixed-citation xml:lang="ru">Reznik A.N., Korolyov S.A. Monopole antenna in quantitative near-field microwave microscopy of planar structures. J. Appl. Phys., 2016, 119, 094504.</mixed-citation><mixed-citation xml:lang="en">Reznik A.N., Korolyov S.A. Monopole antenna in quantitative near-field microwave microscopy of planar structures. J. Appl. Phys., 2016, 119, 094504.</mixed-citation></citation-alternatives></ref><ref id="cit20"><label>20</label><citation-alternatives><mixed-citation xml:lang="ru">Reznik A.N., Korolev S.A., Drozdov M.N. Microwave microscopy of diamond semiconductor structures. J. Appl. Phys., 2017, 121, 264503.</mixed-citation><mixed-citation xml:lang="en">Reznik A.N., Korolev S.A., Drozdov M.N. Microwave microscopy of diamond semiconductor structures. J. Appl. Phys., 2017, 121, 264503.</mixed-citation></citation-alternatives></ref><ref id="cit21"><label>21</label><citation-alternatives><mixed-citation xml:lang="ru">Arkhipova E.A., Demidov E.V., et al. Ohmic contacts to CVD diamond with boron-doped delta layers. Semiconductors, 2019, 53 (10), P. 1348-1352.</mixed-citation><mixed-citation xml:lang="en">Arkhipova E.A., Demidov E.V., et al. Ohmic contacts to CVD diamond with boron-doped delta layers. Semiconductors, 2019, 53 (10), P. 1348-1352.</mixed-citation></citation-alternatives></ref><ref id="cit22"><label>22</label><citation-alternatives><mixed-citation xml:lang="ru">Schreck M., Sˇ cˇajev P., et al. Charge carrier trapping by dislocations in single crystal diamond. J. Appl. Phys., 2020, 127, 125102.</mixed-citation><mixed-citation xml:lang="en">Schreck M., Sˇ cˇajev P., et al. Charge carrier trapping by dislocations in single crystal diamond. J. Appl. Phys., 2020, 127, 125102.</mixed-citation></citation-alternatives></ref><ref id="cit23"><label>23</label><citation-alternatives><mixed-citation xml:lang="ru">Arhipova E.A., Drozdov M.N., et al. Electrophysical properties of delta-boron-doped diamond layers. Proc. of the XXVI Int. Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, 2022, 2, P. 689-690.</mixed-citation><mixed-citation xml:lang="en">Arhipova E.A., Drozdov M.N., et al. Electrophysical properties of delta-boron-doped diamond layers. Proc. of the XXVI Int. Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, 2022, 2, P. 689-690.</mixed-citation></citation-alternatives></ref></ref-list><fn-group><fn fn-type="conflict"><p>The authors declare that there are no conflicts of interest present.</p></fn></fn-group></back></article>
