najoNanosystems: Physics, Chemistry, MathematicsНаносистемы: физика, химия, математика2220-80542305-7971Университет ИТМО10.17586/2220-8054-2023-14-3-349-353najo-312Research ArticlePHYSICSФИЗИКАSingle-step lithography-free fabrication of nanoscale broadband radiation sourcesОдностадийное формирование наноразмерных источников широкополосного излучения без использования литографических процессовhttps://orcid.org/0000-0001-5626-7677АгеевЭ.AgeevE. I.

Эдуард Агеев

Eduard I. Ageev

Kronverkskiy, 49, St. Petersburg, 197101

eiageev@itmo.ruКоромысловС.KoromyslovS. V.

Сергей Коромыслов

Sergej V. Koromyslov

Kronverkskiy, 49, St. Petersburg, 197101

sergej.koromyslov@metalab.ifmo.ruГремиловМ.GremilovM. A.

Михаил Гремилов

Mikhail A. Gremilov

Polytechnicheskaya, 29, St. Petersburg, 195251

mihail.gremilov@mail.ruhttps://orcid.org/0000-0002-4422-0684ДаниловД.DanilovD. V.

Denis V. Danilov

Universitetskaya Emb., 7/9, St. Petersburg, 199034

d.danilov@spbu.ruПетроваЕ.PetrovaE. A.

Elena A. Petrova

Kronverkskiy, 49, St. Petersburg, 197101

elena.petrova@metalab.ifmo.ruhttps://orcid.org/0000-0002-2330-0159ШишкинИ.ShishkinI. I.

Иван Шишкин

Ivan I. Shishkin

Kronverkskiy, 49, St. Petersburg, 197101

i.shishkin@metalab.ifmo.ruhttps://orcid.org/0000-0001-9157-5683ЗуевД.ZuevD. A.

Dmitry A. Zuev

Kronverkskiy, 49, St. Petersburg, 197101

d.zuev@metalab.ifmo.ruITMO UniversityRussian FederationSt. Petersburg Polytechnic University of Peter the GreatRussian FederationSt. Petersburg State UniversityRussian Federation202330062025143349353Copyright © Ageev E.I., Koromyslov S.V., Gremilov M.A., Danilov D.V., Petrova E.A., Shishkin I.I., Zuev D.A., 20252025Агеев Э., Коромыслов С., Гремилов М., Данилов Д., Петрова Е., Шишкин И., Зуев Д.Ageev E.I., Koromyslov S.V., Gremilov M.A., Danilov D.V., Petrova E.A., Shishkin I.I., Zuev D.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://nanojournal.ifmo.ru/jour/article/view/312

In this paper, we present a one-stage method for fabricating hybrid metal-dielectric nanostructures without the use of complex and expensive lithographic processes. The formation of arrays of nanoparticles occurs in the process of irradiation of a two-layer gold-silicon film with simultaneous mixing of materials. In this work, the internal structure of the obtained nanoparticles was studied using the methods of transmission scanning electron microscopy and energy-dispersive X-ray spectroscopy, and their broadband photoluminescence in the range of 450 – 900 nm was also demonstrated. These structures are promising as a source of radiation for optical measurements in lab-on-a-chip devices, which was shown by measuring the transmission spectrum of the Rhodamine B dye as an example.

В настоящей работе представлен одностадийный метод изготовления гибридных металлодиэлектрических наноструктур без использования сложных и дорогостоящих литографических процессов. Формирование массивов наночастиц происходит в процессе облучения двухслойной пленки золото-кремний с одновременным перемешиванием материалов. В работе исследована внутренняя структура полученных наночастиц с помощью методов просвечивающей сканирующей электронной микроскопии и энергодисперсионной рентгеновской спектроскопии, а также продемонстрирована их широкополосная фотолюминесценция в диапазоне 450-900 нм. Данные структуры являются перспективными в качестве источника излучения для проведения оптических измерений в составе устройств типа "лаборатория на чипе", что было показано на примере измерения спектра пропускания красителя Rhodamine B.

: Гибридные наночастицыширокополосная фотолюминесценциялазерно-индуцированное формирование наночастицраспад тонких пленок при нагреведвухслойные пленки кремний-золотоhybrid nanoparticlesbroadband photoluminescencelaser-induced nanoparticlesdewettingbilayer gold-silicon filmsThis work was supported by the Russian Science Foundation (Grant No. 19-79-10259, https://rscf.ru/project/19-79-10259/). SEM and STEM studies were carried out on the basis of the Interdisciplinary Resource Center for Nanotechnology, Research Park, St. Petersburg State University.ReferencesJiang R., Li B., Fang C., Wang J. Metal/semiconductor hybrid nanostructures for plasmon-enhanced applications. Advanced materials, 2014, 26, P. 5274–5309.Jiang R., Li B., Fang C., Wang J. Metal/semiconductor hybrid nanostructures for plasmon-enhanced applications. Advanced materials, 2014, 26, P. 5274–5309.Makarov S., Sinev I., Milichko V., Komissarenko F., Zuev D., Ushakova E., Mukhin I., Yu Y., Kuznetsov A., Belov P., et al. Nanoscale generation of white light for ultrabroadband nanospectroscopy. Nano letters, 2018, 18, P. 535–539.Makarov S., Sinev I., Milichko V., Komissarenko F., Zuev D., Ushakova E., Mukhin I., Yu Y., Kuznetsov A., Belov P., et al. Nanoscale generation of white light for ultrabroadband nanospectroscopy. Nano letters, 2018, 18, P. 535–539.Lebedev D., Shkoldin V., Mozharov A., Larin A., Permyakov D., Samusev A., Petukhov A., Golubok A., Arkhipov A., Mukhin I. Nanoscale Electrically Driven Light Source Based on Hybrid Semiconductor/Metal Nanoantenna. The Journal of Physical Chemistry Letters, 2022, 13, P. 4612–4620.Lebedev D., Shkoldin V., Mozharov A., Larin A., Permyakov D., Samusev A., Petukhov A., Golubok A., Arkhipov A., Mukhin I. Nanoscale Electrically Driven Light Source Based on Hybrid Semiconductor/Metal Nanoantenna. The Journal of Physical Chemistry Letters, 2022, 13, P. 4612–4620.Gurbatov S., Puzikov V., Storozhenko D., Modin E., Mitsai E., Cherepakhin A., Shevlyagin A., Gerasimenko A., Kulinich S., Kuchmizhak A. Multigram-Scale Production of Hybrid Au–Si Nanomaterial by Laser Ablation in Liquid (LAL) for Temperature-Feedback Optical Nanosensing, Light-to-Heat Conversion, and Anticounterfeit Labeling. Appl. Mater. Interfaces, 2023, 15, P. 3336–3347.Gurbatov S., Puzikov V., Storozhenko D., Modin E., Mitsai E., Cherepakhin A., Shevlyagin A., Gerasimenko A., Kulinich S., Kuchmizhak A. Multigram-Scale Production of Hybrid Au–Si Nanomaterial by Laser Ablation in Liquid (LAL) for Temperature-Feedback Optical Nanosensing, Light-to-Heat Conversion, and Anticounterfeit Labeling. Appl. Mater. Interfaces, 2023, 15, P. 3336–3347.Guo H., Hu Q., Zhang C., Liu H., Wu R., Pan S. Strong Plasmon-Mie Resonance in SiPd Core- Shell Nanocavity. Materials, 2023, 16, 1453.Guo H., Hu Q., Zhang C., Liu H., Wu R., Pan S. Strong Plasmon-Mie Resonance in SiPd Core- Shell Nanocavity. Materials, 2023, 16, 1453.Wu J., Dong M., Rigatto C., Liu Y., Lin F. Lab-on-chip technology for chronic disease diagnosis. NPJ Digital Med., 2018, 1, P. 1–11.Wu J., Dong M., Rigatto C., Liu Y., Lin F. Lab-on-chip technology for chronic disease diagnosis. NPJ Digital Med., 2018, 1, P. 1–11.Rezaei S.D., Dong Z., Chan Y.E., Trisno J., Ng R.J.H., Ruan Q., Qiu C.-W., Mortensen N.A., Yang J.K.W. Nanophotonic Structural Colors. ACS Photonics, 2020, 8, P. 18–33.Rezaei S.D., Dong Z., Chan Y.E., Trisno J., Ng R.J.H., Ruan Q., Qiu C.-W., Mortensen N.A., Yang J.K.W. Nanophotonic Structural Colors. ACS Photonics, 2020, 8, P. 18–33.De La Rica R., Stevens M. Plasmonic ELISA for the ultrasensitive detection of disease biomarkers with the naked eye. Nature nanotechnology, 2012, 7, P. 821–824.De La Rica R., Stevens M. Plasmonic ELISA for the ultrasensitive detection of disease biomarkers with the naked eye. Nature nanotechnology, 2012, 7, P. 821–824.Diamandis E.P. Mass Spectrometry as a Diagnostic and a Cancer Biomarker Discovery Tool: Opportunities and Potential Limitations. Molecular & Cellular Proteomics, 2004, 3, P. 367–378.Diamandis E.P. Mass Spectrometry as a Diagnostic and a Cancer Biomarker Discovery Tool: Opportunities and Potential Limitations. Molecular & Cellular Proteomics, 2004, 3, P. 367–378.Loonen A.J.M., Schuurman R., van den Brule A.J.C. Highlights from the 7th European Meeting on Molecular Diagnostics. Expert review of molecular diagnostics, 2012, 12, P. 17–19.Loonen A.J.M., Schuurman R., van den Brule A.J.C. Highlights from the 7th European Meeting on Molecular Diagnostics. Expert review of molecular diagnostics, 2012, 12, P. 17–19.Cho C.-H., Aspetti C.O., Park J., Agarwal R. Silicon coupled with plasmon nanocavities generates bright visible hot luminescence. Nature photonics, 2013, 7, P. 285–289.Cho C.-H., Aspetti C.O., Park J., Agarwal R. Silicon coupled with plasmon nanocavities generates bright visible hot luminescence. Nature photonics, 2013, 7, P. 285–289.Bouhelier A., Beversluis M., Novotny L. Characterization of nanoplasmonic structures by locally excited photoluminescence. Applied Physics Letters, 2003, 83, P. 5041–5043.Bouhelier A., Beversluis M., Novotny L. Characterization of nanoplasmonic structures by locally excited photoluminescence. Applied Physics Letters, 2003, 83, P. 5041–5043.Lepeshov S., Krasnok A., Belov P., Miroshnichenko A. Hybrid nanophotonics Physics–Uspekhi, 2019, 61, 1035.Lepeshov S., Krasnok A., Belov P., Miroshnichenko A. Hybrid nanophotonics Physics–Uspekhi, 2019, 61, 1035.Larin A., Nomine A., Ageev E., Ghanbaja J., Kolotova L., Starikov S., Bruy‘ere S., Belmonte T., Makarov S., Zuev D. Plasmonic nanosponges filled with silicon for enhanced white light emission. Nanoscale, 2020, 12, P. 1013–1021.Larin A., Nomine A., Ageev E., Ghanbaja J., Kolotova L., Starikov S., Bruy‘ere S., Belmonte T., Makarov S., Zuev D. Plasmonic nanosponges filled with silicon for enhanced white light emission. Nanoscale, 2020, 12, P. 1013–1021.Koromyslov S., Ageev E., Ponkratova E., Larin A., Shishkin I., Danilov D., Mukhin I., Makarov S., Zuev D. Femtosecond Laser-Assisted Formation of Hybrid Nanoparticles from Bi-Layer Gold-Silicon Films for Microscale White-Light Source. Nanomaterials, 2022, 12, 1756.Koromyslov S., Ageev E., Ponkratova E., Larin A., Shishkin I., Danilov D., Mukhin I., Makarov S., Zuev D. Femtosecond Laser-Assisted Formation of Hybrid Nanoparticles from Bi-Layer Gold-Silicon Films for Microscale White-Light Source. Nanomaterials, 2022, 12, 1756.Dmitriev P., Lassalle E., Ding L., Pan Z., Neo D., Valuckas V., Paniagua-Dominguez R., Yang J., Demir H., Kuznetsov A. Hybrid Dielectric- Plasmonic Nanoantenna with Multiresonances for Subwavelength Photon Sources. ACS Photonics, 2023, 10, P. 582–594.Dmitriev P., Lassalle E., Ding L., Pan Z., Neo D., Valuckas V., Paniagua-Dominguez R., Yang J., Demir H., Kuznetsov A. Hybrid Dielectric- Plasmonic Nanoantenna with Multiresonances for Subwavelength Photon Sources. ACS Photonics, 2023, 10, P. 582–594.Tiwari S., Taneja C., Sharma V., Vasista A., Paul D., Kumar G. Dielectric Microsphere Coupled to a Plasmonic Nanowire: A Self-Assembled Hybrid Optical Antenna. Adv. Opt. Mater., 2020, 8, 1901672.Tiwari S., Taneja C., Sharma V., Vasista A., Paul D., Kumar G. Dielectric Microsphere Coupled to a Plasmonic Nanowire: A Self-Assembled Hybrid Optical Antenna. Adv. Opt. Mater., 2020, 8, 1901672.Zuev D., Makarov S., Mukhin I., Milichko V., Starikov S., Morozov I., Shishkin I., Krasnok A., Belov P. Fabrication of Hybrid Nanostructures via Nanoscale Laser-Induced Reshaping for Advanced Light Manipulation. Advanced Materials, 2016, 28, P. 3087–3093.Zuev D., Makarov S., Mukhin I., Milichko V., Starikov S., Morozov I., Shishkin I., Krasnok A., Belov P. Fabrication of Hybrid Nanostructures via Nanoscale Laser-Induced Reshaping for Advanced Light Manipulation. Advanced Materials, 2016, 28, P. 3087–3093.Adachi N.N. Eutectic reaction of gold thin-films deposited on silicon surface. Surface science, 2002, 506, P. 305–312.Adachi N.N. Eutectic reaction of gold thin-films deposited on silicon surface. Surface science, 2002, 506, P. 305–312.Ruffino F., Pugliara A., Carria E., Romano L., Bongiorno C., Spinella C., Grimaldi M. Novel approach to the fabrication of Au/silica core–shell nanostructures based on nanosecond laser irradiation of thin Au films on Si. Nanotechnology, 2012, 23, 045601.Ruffino F., Pugliara A., Carria E., Romano L., Bongiorno C., Spinella C., Grimaldi M. Novel approach to the fabrication of Au/silica core–shell nanostructures based on nanosecond laser irradiation of thin Au films on Si. Nanotechnology, 2012, 23, 045601.Zhigunov D., Evlyukhin A., Shalin A., Zywietz U., Chichkov B. Femtosecond Laser Printing of Single Ge and SiGe Nanoparticles with Electric and Magnetic Optical Resonances. ACS Photonics, 2018, 5, P. 977–983.Zhigunov D., Evlyukhin A., Shalin A., Zywietz U., Chichkov B. Femtosecond Laser Printing of Single Ge and SiGe Nanoparticles with Electric and Magnetic Optical Resonances. ACS Photonics, 2018, 5, P. 977–983.Kucherik A., Kutrovskaya S., Osipov A., Gerke M., Chestnov I., Arakelian S., Shalin A., Evlyukhin A., Kavokin A. Nano-Antennas Based on Silicon-Gold Nanostructures. Scientific Reports, 2019, 9, P. 1–6.Kucherik A., Kutrovskaya S., Osipov A., Gerke M., Chestnov I., Arakelian S., Shalin A., Evlyukhin A., Kavokin A. Nano-Antennas Based on Silicon-Gold Nanostructures. Scientific Reports, 2019, 9, P. 1–6.Al-Kattan A., Tselikov G., Metwally K., Popov A., Mensah S., Kabashin A. Laser Ablation-Assisted Synthesis of Plasmonic Si@Au Core-Satellite Nanocomposites for Biomedical Applications. Nanomaterials, 2021, 11, 592.Al-Kattan A., Tselikov G., Metwally K., Popov A., Mensah S., Kabashin A. Laser Ablation-Assisted Synthesis of Plasmonic Si@Au Core-Satellite Nanocomposites for Biomedical Applications. Nanomaterials, 2021, 11, 592.Ye J., Zuev D., Makarov S. Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems. Int. Materials Reviews, 2019, 64, P. 439–477.Ye J., Zuev D., Makarov S. Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems. Int. Materials Reviews, 2019, 64, P. 439–477.Makarov S.V., Milichko V.A., Mukhin I.S., Shishkin I.I., Zuev D.A., Mozharov A.M., Krasnok A.E., Belov P.A. Controllable femtosecond laserinduced dewetting for plasmonic applications. Laser Photonics Rev., 2016, 10, P. 91–99.Makarov S.V., Milichko V.A., Mukhin I.S., Shishkin I.I., Zuev D.A., Mozharov A.M., Krasnok A.E., Belov P.A. Controllable femtosecond laserinduced dewetting for plasmonic applications. Laser Photonics Rev., 2016, 10, P. 91–99.Syubaev S., Mitsai E., Starikov S., Kuchmizhak A. Laser-printed hemispherical silicon Mie resonators. Optics Letters, 2021, 46, P. 2304–2307.Syubaev S., Mitsai E., Starikov S., Kuchmizhak A. Laser-printed hemispherical silicon Mie resonators. Optics Letters, 2021, 46, P. 2304–2307.Zhang C., Xu Y., Liu J., Li J., Xiang J., Li H., Li J., Dai Q., Lan S., Miroshnichenko A.E. Lighting up silicon nanoparticles with Mie resonances. Nat. Commun., 2018, 9, P. 1–7.Zhang C., Xu Y., Liu J., Li J., Xiang J., Li H., Li J., Dai Q., Lan S., Miroshnichenko A.E. Lighting up silicon nanoparticles with Mie resonances. Nat. Commun., 2018, 9, P. 1–7.

The authors declare that there are no conflicts of interest present.