najoNanosystems: Physics, Chemistry, MathematicsНаносистемы: физика, химия, математика2220-80542305-7971Университет ИТМО10.17586/2220-8054-2020-11-1-110-116najo-473Research ArticleCHEMISTRY AND MATERIALS SCIENCEХИМИЯ И НАУКА О МАТЕРИАЛАХModification of nanoscale thermal oxide films formed on indium phosphide under the influence of tin dioxideMittovaI. Ya.

Universitetskaya pl., Voronezh, 394018

imittova@mail.ruKostryukovV. F.

Universitetskaya pl., Voronezh, 394018

vc@chem.vsu.ruIlyasovaN. A.

Universitetskaya pl., Voronezh, 394018

ilyasova_1997@mail.ruSladkopevtsevB. V.

Universitetskaya pl., Voronezh, 394018

dp-kmins@yandex.ruSamsonovA. A.

Universitetskaya pl., Voronezh, 394018

samsonjr@mail.ruVoronezh State UniversityRussian Federation202031072025111110–116Copyright © Mittova I.Y., Kostryukov V.F., Ilyasova N.A., Sladkopevtsev B.V., Samsonov A.A., 20252025Mittova I.Y., Kostryukov V.F., Ilyasova N.A., Sladkopevtsev B.V., Samsonov A.A.Mittova I.Y., Kostryukov V.F., Ilyasova N.A., Sladkopevtsev B.V., Samsonov A.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://nanojournal.ifmo.ru/jour/article/view/473

The kinetic parameters and the limiting stage of the defining process were established by studying the thermal oxidation of SnO2/InP heterostructures (thickness of SnO2 layer ∼ 50 nm). It was established that SnO2 does not have a chemical stimulating effect on the film growth rate; however, it is effective as a modifier of their structure and properties. SnO2 provides the formation of nanoscale films with semiconductor properties.

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The authors declare that there are no conflicts of interest present.