Chemostimulating e ect of mixture and separate evaporation of manganese (IV) oxide compositions with lead (II) oxide and vanadium (V) oxide on GaAs thermal oxidation

Аннотация

The e ects of variable compositions of manganese (IV) oxide- lead (II) oxide and manganese (IV) oxide vanadium (V) oxide on the GaAs thermal oxidation process have been studied. The spatial separation of the oxides in MnO2 + PbO and MnO2 + V2O5 binary compositions activating the thermal oxidation of GaAs has made it possible to locate the interactions between these oxides that are responsible for the non-linear e ects observed in their coaction. Solid-phase interactions enhance the chemostimulating activities of both oxides (a positive nonlinear e ect takes place). Gas-phase interactions cause a marked negative deviation from the additive chemical stimulation e ect.