Effect of oxide composition (V2O5+Al2O3) via gas phase on the thermal oxidation of InP
Abstract
The effect of the oxide-chemostimulator V2O5 and the inert component Al2O3 binary compositions on the thermal oxidation of InP have been studied. The area of negative deviation of nanoscale oxide film thickness on InP from the additive joint effect has been established with a minimum for a composition of 20% Al2O3 + 80% V2O5. A decrease in the transit efficiency effect of V2O5 chemostimulator in composition with Al2O3 has been associated with an intensification of the transformation of V2O5 into V2O3, which is not an oxygen transitor.
Keywords
Supporting agencies: This research was supported by the Russian Foundation for Basic Research, grant No. 13 03-00705-a.
About the Authors
B. V. Sladkopevtcev
Voronezh State University
Russian Federation
Russian Federation
Voronezh
N. N. Tretyakov
Voronezh State University
Russian Federation
Russian Federation
Voronezh
A. I. Dontsov
Voronezh State University
Russian Federation
Russian Federation
Voronezh
E. V. Tomina
Voronezh State University
Russian Federation
Russian Federation
Voronezh
I. Ya. Mittova
Voronezh State University
Russian Federation
Russian Federation
Voronezh
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Review
For citations:
Sladkopevtcev B.V., Tretyakov N.N., Dontsov A.I., Tomina E.V., Mittova I.Ya. Effect of oxide composition (V2O5+Al2O3) via gas phase on the thermal oxidation of InP. Nanosystems: Physics, Chemistry, Mathematics. 2013;4(2):260-268.
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