Formation of laser-induced periodic surface structures on an As50Se50 film under femtosecond laser irradiation with wavelengths of 400-800 nm
https://doi.org/10.17586/2220-8054-2025-16-6-908-914
Abstract
Laser-induced periodic surface structures (LIPSS) on chalcogenide glassy semiconductors are of great interest in relation with creating polarization-sensitive optical elements. This study investigates the formation of LIPSS on the surface of As50Se50 amorphous film, fabricated by thermal vacuum deposition, under femtosecond laser irradiation in the wavelength range from 400 to 800 nm. The periods of various LIPSS types depend linearly on the laser wavelength. The measured birefringence of so-called low spatial frequency LIPSS, formed by different irradiation wavelengths, are in the 10–85 nm range. The maximum birefringence of 85 nm was obtained for structures irradiated at a 480 nm wavelength. A significant decrease in birefringence was observed at a wavelength of 800 nm, which may be due to the formation of a less pronounced and more disordered surface relief caused by less effective absorption of modifying laser radiation with photon energy lower than optical band gap of As50Se50. Decreased optical absorption observed in As50Se50 films with LIPSS is caused by increased light scattering on the surface relief.
Keywords
laser-induced periodic surface structures,
As50Se50 amorphous films,
laser-induced birefringence,
optical retardance.
Supporting agencies: This work was supported by the Russian Science Foundation (Grant No. 22-19-00035- Π, https://rscf.ru/project/22-19-00035/
About the Authors
P. P. Pakholchuk
Lebedev Physical Institute, Russian Academy of Sciences; Moscow State University
Russian Federation
Russian Federation
Petr P. Pakholchuk - Faculty of Physics
53 Leninsky Avenue, Moscow 119991; 1/2 Leninskie Gory, Moscow, 119991
D. V. Shuleiko
Moscow State University
Russian Federation
Russian Federation
Dmitrii V. Shuleiko – Faculty of Physics
1/2 Leninskie Gory, Moscow, 119991
V. A. Barbashov
Lebedev Physical Institute, Russian Academy of Sciences
Russian Federation
Russian Federation
Vadim A. Barbashov
53 Leninsky Avenue, Moscow, 119991
S. V. Zabotnov
Moscow State University
Russian Federation
Russian Federation
Stanislav V. Zabotnov – Faculty of Physics
1/2 Leninskie Gory, Moscow, 119991
S. A. Kozyukhin
Kurnakov Institute of General and Inorganic Chemistry
Russian Federation
Russian Federation
Sergey A. Kozyukhin
31 Leninsky Avenue, Moscow, 119071
P. K. Kashkarov
Lebedev Physical Institute, Russian Academy of Sciences, Moscow State University; National Research Centre “Kurchatov Institute”
Russian Federation
Russian Federation
Pavel K. Kashkarov – Faculty of Physics
1/2 Leninskie Gory, Moscow, 119991; 1 Akademika Kurchatova Sq., Moscow, 123182
References
1. Iovu M.S., Shutov S.D., Popescu M. Relaxation of photodarkening in amorphous As–Se films doped with metals. J. Non-Cryst. Solids, 2002, 299, P. 924–928.
2. Arsh A., Klebanov M., Lyubin V., Shapiro L., Feigel A., Veinger M., Sfez B. Glassy mAs2S3 · nAs2Se3 photoresist films for interference laser lithography. Opt. Mater., 2004, 26(3), P. 301–304.
3. Flaxer E., Klebanov M., Abrahamoff D., Noah S., Lyubin V. Photodarkening of As50Se50 glassy films under µs light pulses. Opt. Mater., 2009, 31(4), P. 688–690.
4. Savage J.A. Optical properties of chalcogenide glasses. J. Non-Cryst. Solids, 1982, 47(1), P. 101–115.
5. Petkov K., Ewen P.J.S. Photoinduced changes in the linear and non-linear optical properties of chalcogenide glasses. J. Non-Cryst. Solids, 1999, 249(2), P. 150–159.
6. Harbold J.M., Ilday F.O., Wise F.W., Sanghera J.S., Nguyen V.Q., Shaw L.B., Aggarwal I.D. Highly nonlinear As–S–Se glasses for all-optical ¨ switching. Opt. Lett., 2002, 27(2), P. 119–121.
7. Shuleiko D., Zabotnov S., Sokolovskaya O., Poliakov M., Volkova L., Kunkel T., Kuzmin E., Danilov P., Kudryashov S., Pepelayev D., Kozyukhin S., Golovan L., Kashkarov P. Hierarchical Surface Structures and Large-Area Nanoscale Gratings in As2S3 and As2Se3 Films Irradiated with Femtosecond Laser Pulses. Materials, 2023, 16(13), P. 4524.
8. Yu X., Qi D., Wang H., Zhang Y., Wang L., Zhang Z., Dai Sh., Shen X., Zhang P., Xu Y. In situ and ex-situ physical scenario of the femtosecond laser-induced periodic surface structures. Optics Express, 2019, 27(7), P. 10087–10097.
9. Zabotnov S., Kolchin A., Shuleiko D., Presnov D., Kaminskaya T., Lazarenko P., Glukhenkaya V., Kunkel T., Kozyukhin S., Kashkarov P. Periodic relief fabrication and reversible phase transitions in amorphous Ge2Sb2Te5 thin films upon multi-pulse femtosecond irradiation. Micro, 2022, 2(1), P. 88–99.
10. Bonse J., Kirner S.V., Kruger J. ¨ Laser-Induced Periodic Surface Structures (LIPSS). In: Sugioka, K. (eds) Handbook of Laser Micro- and NanoEngineering. Springer, Cham, 2021, 59 p.
11. Akhmanov S.A., Emel’yanov V.I., Koroteev N.I., Seminogov V.N. The effect of high-power laser radiation on the surface of semiconductors and metals: nonlinear optical effects and nonlinear optical diagnostics. Sov. Phys. Usp., 1985, 147(12), P. 675–745.
12. Bonse J., Rosenfeld A., Kruger J. On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon ¨ irradiation of silicon by femtosecond-laser pulses. Journal of Applied Physics, 2009, 106(10), P. 104910.
13. Bonse J., Kruger J., H ¨ ohm S., Rosenfeld A. Femtosecond laser-induced periodic surface structures. ¨ Journal of laser applications, 2012, 24(4), P. 042006.
14. Kuzmin E., Zabotnov S., Shuleiko D., Pepelyaev D., Barbashov V., Efanov V., Kashkarov P. Laser-Induced Structuring of Arsenic Selenide Vitreous Films and Their Optical Properties. Bulletin of the Russian Academy of Sciences: Physics, 2024, 88(3), P. S370–S374.
15. Kozyukhin S., Lazarenko P., Vorobyov Yu., Baranchikov A., Glukhenkaya V., Smayev M., Sherchenkov A., Sybina Yu., Polohin A., Sigaev V. Laser-induced modification and formation of periodic surface structures (ripples) of amorphous GST225 phase change materials. Optics and Laser Technology, 2019, 113, P. 87–94.
16. Kozyukhin S., Smayev M., Sigaev V., Vorobyov Y., Zaytseva Y., Sherchenkov A., Lazarenko P. Specific features of formation of laser-induced periodic surface structures on Ge2Sb2Te5 Amorphous Thin Films under Illumination by Femtosecond Laser Pulses. Physica Status Solidi B, 2020, 257(11), P. 1900617.
17. Corrales C., Ram´ırez-Malo J.B., Marquez E., Jim ´ enez-Garay R. An optical study of the athermal photo-amorphization of As ´ 50Se50 thin films. Materials Science and Engineering: B, 1997, 47(2), P. 119–126.
18. Behera M., Naik P., Panda R., Naik R. Optical properties study in As50Se50 and As50Se40Te10 chalcogenide thin films. Proceeding of “DAE SOLID STATE PHYSICS SYMPOSIUM 2016”. Bhubaneswar, 2016, AIP Publishing LLC, 2017, P. 070009.
Review
For citations:
Pakholchuk P.P., Shuleiko D.V., Barbashov V.A., Zabotnov S.V., Kozyukhin S.A., Kashkarov P.K. Formation of laser-induced periodic surface structures on an As50Se50 film under femtosecond laser irradiation with wavelengths of 400-800 nm. Nanosystems: Physics, Chemistry, Mathematics. 2025;16(6):908-914. https://doi.org/10.17586/2220-8054-2025-16-6-908-914
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