Тонкие пленки TiO2/SiO2 на кремнии, полученные с использованием золь-гель центрифужного осаждения, отражающие в ультрафиолетовой и видимой областях
https://doi.org/10.17586/2220-8054-2021-12-3-311-316
Аннотация
Альтернативные тонкие пленки (пакеты) TiO2/SiO2 были нанесены на кремниевые подложки с использованием методов золь-гель центрифугирования. Свойства приготовленных образцов анализировали с помощью спектрофотометрии в УФ-видимой области (UV-Vis), рентгеновской дифрактометрии (XRD), поверхностного профилометра и рамановской спектроскопии. Оптические и кристаллизационные свойства тонких пленок варьировались и сравнивались путем изменения количества стэков. УФ-видимый спектр показал высокую отражательную способность и смещение в инфракрасную область из-за увеличения количества слоев TiO2/SiO2. Спектры РФА подтвердили наличие дифракционных пиков анатаза TiO2 и SiO2. Толщину многослойной пленки рассчитывали при 109 и 151 нм при двух и четырех стэках с помощью поверхностного профилометра. Спектры КРС подтвердили валентные моды Si-O-Si и TiO2 при 2600, 980 и 519 см-1. Это исследование выявило многообещающие и эффективные свойства отражения в ультрафиолетовом и видимом диапазонах альтернативных тонких пленок TiO2/SiO2 на кремниевой подложке.
Об авторах
S. Saravanan
Advanced Research Laboratory for Nanomaterials & Devices, Department of Nanotechnology, Swarnandhra College of Engineering & Technology
Индия
Индия
R. S. Dubey
Advanced Research Laboratory for Nanomaterials & Devices, Department of Nanotechnology, Swarnandhra College of Engineering & Technology
Индия
Индия
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Рецензия
Для цитирования:
Saravanan S., Dubey R.S. Тонкие пленки TiO2/SiO2 на кремнии, полученные с использованием золь-гель центрифужного осаждения, отражающие в ультрафиолетовой и видимой областях. Наносистемы: физика, химия, математика. 2021;12(3):311-316. https://doi.org/10.17586/2220-8054-2021-12-3-311-316
For citation:
Saravanan S., Dubey R.S. Ultraviolet and visible reflective TiO2/SiO2 thin films on silicon using sol-gel spin coater. Nanosystems: Physics, Chemistry, Mathematics. 2021;12(3):311-316. https://doi.org/10.17586/2220-8054-2021-12-3-311-316
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