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| Vol 5, No 1 (2014) | CVD growth of carbon nanotubes with a Ni catalyst in a polyimide trench | Abstract PDF (Eng) similar documents |
| K. Schneider, B. Stamm, K. Gutöhrlein, C. Burkhardt,, A. Stett, D. P. Kern | ||
| "... in these contact areas by a low temperature (350 ◦C) chemical vapour deposition process from a catalyst which ..." | ||
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