For citations:
Khramov A.S., Vasilev M.D., Sinev D.A., Shakhno E.A. Subwavelength LIPSS-based nanopatterning of thin titanium films. Nanosystems: Physics, Chemistry, Mathematics. 2025;16(6):755-762. https://doi.org/10.17586/2220-8054-2025-16-6-755-762