Для цитирования:
, , , , , . Наносистемы: физика, химия, математика. 2018;9(6):789–792. https://doi.org/10.17586/2220-8054-2018-9-6-789-792
For citation:
Mitin D.M., Soldatenkov F.Yu., Mozharov A.M., Vasil’ev A.A., Neplokh V.V., Mukhin I.S. Annealing atmosphere influence on contact resistivity of ohmic Pd/Ge/Au contact to n-GaAs. Nanosystems: Physics, Chemistry, Mathematics. 2018;9(6):789–792. https://doi.org/10.17586/2220-8054-2018-9-6-789-792