НАНОСИСТЕМЫ: ФИЗИКА, ХИМИЯ, МАТЕМАТИКА, 2011, 2 (1), С. 116–120
ОПТИЧЕСКИЕ ФУНКЦИИ И ПАРАМЕТРЫ ЗОННОЙ СТРУКТУРЫ ТОНКИХ СЛОЕВ ПОРИСТОГО КРЕМНИЯ В ДИАПАЗОНЕ ЭНЕРГИЙ 0,1–6,2 эВ
Д. Т. Ян(1)
(1)Дальневосточный государственный университет путей сообщения, Хабаровск, Россия
dmitry_yan@mail.ru
Проведено исследование оптических свойств слоев пористого кремния, полученного на кристаллическом кремнии р-типа (100) методом анодного травления. Из оптических спектров на пропускание и отражение проведена оценка основных оптических характеристик пористого кремния. Установлено, что явление видимой фотолюминесценции пористого кремния обусловлено изменением параметров зонной структуры.
Ключевые слова: пористый кремний, фотолюминесценция, рекомбинация.
УДК 537.533.3
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