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NANOSYSTEMS: PHYSICS, CHEMISTRY, MATHEMATICS, 2015, 6 (3), P. 424–434

Chemostimulating effect of mixture and separate evaporation of manganese (IV) oxide compositions with lead (II) oxide and vanadium (V) oxide on GaAs thermal oxidation

I. Ya. Mittova – Voronezh State University, Universitetskaya pl.1, Voronezh, 394893 Russia; imittova@mail.ru
V. F. Kostryukov – Voronezh State University, Universitetskaya pl.1, Voronezh, 394893 Russia; vc@chem.vsu.ru

The effects of variable compositions of manganese (IV) oxide – lead (II) oxide and manganese (IV) oxide – vanadium (V) oxide on the GaAs thermal oxidation process have been studied. The spatial separation of the oxides in MnO₂ + PbO and MnO₂ + V₂O₅ binary compositions activating the thermal oxidation of GaAs has made it possible to locate the interactions between these oxides that are responsible for the non-linear effects observed in their coaction. Solid-phase interactions enhance the chemostimulating activities of both oxides (a positive nonlinear effect takes place). Gas-phase interactions cause a marked negative deviation from the additive chemical stimulation effect.

Keywords: semiconductors, gallium arsenide, thin films, thermal oxidation, nonlinear effects.

PACS 81.05.Ea

DOI 10.17586/2220-8054-2015-6-3-424-434

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