НАНОСИСТЕМЫ: ФИЗИКА, ХИМИЯ, МАТЕМАТИКА, 2011, 2 (1), С. 23–39
МЕТОДЫ ЦИФРОВОЙ ГОЛОГРАФИЧЕСКОЙ ИНТЕРФЕРОМЕТРИИ И ИХ ПРИМЕНЕНИЕ ДЛЯ ИЗМЕРЕНИЯ НАНОПЕРЕМЕЩЕНИЙ
В работе проведено сопоставление классических и цифровых методов голографической интерферометрии, показано преимущество цифровой голографии. Описаны новые цифровые методы, расширяющие возможности голографических измерений, диапазон исследований, наглядность представления результатов. Проанализированы все этапы регистрации, обработки и представления результатов измерений, проведены оценки требований к регистрирующим устройствам. Подробно рассмотрены проблемы автоматизации процесса голографических измерений, программно-аппаратные средства для создания полностью автоматизированного цифрового голографического измерительного комплекса. Приведены практические примеры использования цифровой голографии в механике, контрольно-измерительной технике, оптико-физических измерений. Показано, что данные цифровые голографические системы могут эффективно использоваться для измерений перемещений нанометрового диапазона.
Ключевые слова: голографическая интерферометрия, цифровая голография, виброметрия, наноизмерения, неразрушающий контроль, бесконтактная диагностика.
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