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NANOSYSTEMS: PHYSICS, CHEMISTRY, MATHEMATICS, 2012, 3 (3), P. 110–122

X-RAY SCATTERING FROM LAYERED NANOSYSTEMS WITH ROUGH INTERFACES

S.V. Ulyanov – Saint Petersburg State University, Department of Physics, Saint Petersburg, Russia; St. Petersburg Institute Commerce and Economics, Saint Petersburg, Russia, Professor, D.Sc., ulyanov_sv@mail.ru
V.P. Romanov – Saint Petersburg State University, Department of Physics, Saint Petersburg, Russia, Professor, D.Sc., vpromanov@mail.ru
V.M. Uzdin – Saint Petersburg State University, Department of Physics, Saint Petersburg, Russia; Saint Petersburg National Research University of Information Technologies, Mechanics and Optics, Saint Petersburg, Russia, Professor, D.Sc., v_uzdin@mail.ru

The theory of X-ray scattering from the multilayers with rough interfaces is developed. Both kinematic (Born) and dynamic (the distorted wave Born) approaches are considered. Modeling of x-ray specular scattering for the superlattices with different periods as well as amplitudes and correlation lengths of interface roughness are performed. The results of calculations in different approximations are compared with experiment.

Keywords: layered nanosystems, superlattices, interface roughness, x-ray and synchrotron radiation scattering.

UDC 535.34

PACS 61.05.cf, 61.05.cm, 73.21.Ac, 78.70.Ck

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