NANOSYSTEMS: PHYSICS, CHEMISTRY, MATHEMATICS, 2012, 3 (6), P. 134–145
THE FEATURES OF FORMATION AND MODIFICATION OF NANOSTRUCTURED FILMS OF CARBON NITRIDE
A.M.Prudnikov – A.A.Galkin Donetsk Institute for Physics and Engineering of National Academy of Sciences of Ukraine, Donetsk, Ukraine, senior researcher, PhD, prud@fti.dn.ua
A.I.Linnik – A.A.Galkin Donetsk Institute for Physics and Engineering of National Academy of Sciences of Ukraine, Donetsk, Ukraine, senior researcher, PhD, linnikal@mail.ru
R.V.Shalaev – A.A.Galkin Donetsk Institute for Physics and Engineering of National Academy of Sciences of Ukraine, Donetsk, Ukraine, senior researcher, PhD, sharos@fti.dn.ua
V.V.Rumyantsev – A.A.Galkin Donetsk Institute for Physics and Engineering of National Academy of Sciences of Ukraine, Donetsk, Ukraine, head of Physics Technology Department, PhD, Dr Sci, professor, rumyants@teor.fti.ac.donetsk.ua
A.O. Kucherik – Vladimir State University named after A. G. and N. G. Stoletov, Vladimir, Russia.
A.P. Alodjants – Vladimir State University named after A. G. and N. G. Stoletov, Vladimir, Russia, Professor, Doctor of science, associate professor, alexander_ap@list.ru
S.M. Arakelian – Vladimir State University named after A. G. and N. G. Stoletov, Vladimir, Russia, Professor, Doctor of science, arak@vlsu.ru
The aim of this work was obtaining and experimental study of carbon nitride films. By the methods of thermogravimetric analysis (TGA), optical spectroscopy and scanning electron microscopy it was found that diamond-like films CNX consist of two phases: a nanostructured and amorphous. It was discovered that short-term heat treatment of the diamond-like films on air at 610 K results in etching of the amorphous phase and the formation of a divided columnar nanostructures.
Keywords: diamond-like films, carbon nitride, thermogravimetric analysis.
UDC 538.958, 538.975
PACS 61.48.De, 68.37.Hk, 81.15.Cd
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