NANOSYSTEMS: PHYSICS, CHEMISTRY, MATHEMATICS, 2013, 4 (2), P. 260–268
EFFECT OF OXIDE COMPOSITION (V2O5+Al2O3) VIA GAS PHASE ON THE THERMAL OXIDATION OF InP
B.V. Sladkopevtcev – Voronezh State University, Voronezh, Russia
N. N. Tretyakov – Voronezh State University, Voronezh, Russia
A. I. Dontsov – Voronezh State University, Voronezh, Russia
E.V. Tomina – Voronezh State University, Voronezh, Russia
I.Ya. Mittova – Voronezh State University, Voronezh, Russia
inorg@chem.vsu.ru
The effect of the oxidechemostimulator V2O5 and the inert component Al2O3 binary compositions on the thermal oxidation of InP have been studied. The area of negative deviation of nanoscale oxide film thickness on InP from the additive joint effect has been established with a minimum for a composition of 20% Al2O3 + 80% V2O5. A decrease in the transit efficiency effect of V2O5 chemostimulator in composition with Al2O3 has been associated with an intensification of the transformation of V2O5 into V2O3, which is not an oxygen transitor.
Keywords: indium phosphide, thermal oxidation, transitor, chemostimulator, vanadium oxides, nanoscale films.
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