NANOSYSTEMS: PHYSICS, CHEMISTRY, MATHEMATICS, 2015, 6 (3), P. 424–434
Chemostimulating effect of mixture and separate evaporation of manganese (IV) oxide compositions with lead (II) oxide and vanadium (V) oxide on GaAs thermal oxidation
I. Ya. Mittova – Voronezh State University, Universitetskaya pl.1, Voronezh, 394893 Russia; firstname.lastname@example.org
V. F. Kostryukov – Voronezh State University, Universitetskaya pl.1, Voronezh, 394893 Russia; email@example.com
The effects of variable compositions of manganese (IV) oxide – lead (II) oxide and manganese (IV) oxide – vanadium (V) oxide on the GaAs thermal oxidation process have been studied. The spatial separation of the oxides in MnO2 + PbO and MnO2 + V2O5 binary compositions activating the thermal oxidation of GaAs has made it possible to locate the interactions between these oxides that are responsible for the non-linear effects observed in their coaction. Solid-phase interactions enhance the chemostimulating activities of both oxides (a positive nonlinear effect takes place). Gas-phase interactions cause a marked negative deviation from the additive chemical stimulation effect.
Keywords: semiconductors, gallium arsenide, thin films, thermal oxidation, nonlinear effects.